MKS HMPX60Q-MKS High Power Microwave Plasma System (6kW; 2440-2470MHz; Quartz)
Manufacturer: MKS Model: HMPX60Q-MKS - Request a Quotation
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Maximum Plasma Power Output: 6.0 kW
Frequency: 2,440-2,470 MHz
Output Accuracy: <1% closed loop control
Ambient Temperature: Up to 40°C max
Microwave Connections: WR284F waveguide with CPR284F flanges
Power Requirements: 200-208 VAC, 3 phase, 50/60 Hz
Autotune: <1.5 seconds with <2% reflected power
Chemistries: O2, N2H2, N2, H2O, NH3, H2
Applicator Material: Quartz
Operating Pressure: 1 - 10 Torr
Communications: Analog, RS485
Compliance: CE
Configuration: KF40, custom
Cooling: Water: 1 GPM, 20-30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
Power Supply Generator Dimensions: (7U rack) 19 H x 12.2 W x 20.03 D in. (482.6 x 309.88 x 508.76 mm)
Power Head Magnetron Head Dimensions: 9.85 H x 9.85 W x 16 D in. (250.19 x 250.19 x 406.4 mm)
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- Delivery Avaliable
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