Brooks Instrument SLAMF53 Gas Mass Flow Controller (100 - 2500 slpm, EtherNET/IP, 3/4” VCO)

Digital Communications I/O: EtherNET/IP

Mechanical Connection: 3/4” VCO

Valve Type: Normally closed (Pressure diff. <30 psig (2 bar))

Analog Communications I/O: None

Revision Level: RevB

Performance:

Full Scale Flow Range (N2, Eq. 0ºC Ref): 100 - 1100 slpm/ 1100-2500 slpm

Flow Accuracy—17025 Certified Devices:  ±0.6% of S.P. (20 - 100% F.S.), ±0.12% of F.S. (<20% F.S.)/ ±0.6% of F.S

Flow Accuracy:  ±0.9% of S.P. (20 - 100% F.S.), ±0.18% of F.S. (<20% F.S.)/ ±1.0% of F.S.

Control Range N2, eq.: 100:1 for F.S. from 1 - 50 slpm (50:1 for all other F.S. flows)

Repeatability & Reproducibility: 0.20% S.P

Linearity: Included in accuracy

Response Time: <3 second

Zero Stability: <+0.2% F.S. per year

Temperature Coefficient: Zero: <0.05% of F.S. per °C Span: <0.1% of S.P. per °C

Attitude Sensitivity: <0.2% F.S. maximum deviation from specified accuracy after re-zeroing

Ratings

Operating Temperature Range: (-14) - 65°C (7 - 149°F)

Minimum Pressure Differential: Min.: 7.5 psi / 0.52 bar at 500 lpm

Min.: 14.5 psi / 1.00 bar at 1000 lpm

Min.: 35.0 psi / 2.41 bar at 2500 lpm

Maximum Pressure Differential: Application specific up to 1500 psi / 103.4 bar

Leak Integrity: 1x10^-9 atm. cc/sec He

Valve Shut Down: <1% of F.S. standard; improved shut off available with Biotech package

For more details, see datasheet.