Fcon C1030-6S2-5L-AR Mass Flow Controller (5SLM)

Flow range: 30 SLM

Gases: Ar

Valve type: NO: Normally open

Flow rate control range: 5-100％ F.S

Accuracy: ±2％ F.S [※±1％ F.S Compatible]

Setting signal: 0.25-5VDC

Output signal: 0-5VDC

Repeatability: ±0.2％ F.S

Response: ≦6sec

Pressure resistance: 1MPa(G)

Operating temperature: 5-50℃, ≦85％RH (Scope of accuracy guarantee : 15-35℃)

Leak integrity: 1×10-7Pa･m3/sec He

Drive power source: +15VDC: 60mA, -15VDC: 150mA

Communication: Analog 0-5VDC

Wetted surface material: SUS316L, PTFE, Fluoro-Rubber

Seal material: Fluoro-Rubber

Actuator system: Thermal

Standard fitting: 3/8in.SWL

Accessory: User's manual, Written Guarantee