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Flow range: 10SCCM~100SLM
Gases: CO2
Valve type: NO: Normally Open
Flow rate control range: 5～100％ F.S.(Excluding Mass Flow Meter)
Accuracy: ±2％ F.S [※±1％ F.S Compatible] (Accuracy guaranteed between 15-35℃)
Setting signal: 0.25～5VDC
Output signal: 0～5VDC
Repeatability: ±0.2％ F.S
Response: Depends on MFC selected.
Operating differential pressure: Depends on MFC selected.
Pressure resistance: 1MPa(G)
Operating temperature: 5-50℃(Accuracy guaranteedbetween 15～35℃), ≦85％RH(No condensation permitted)
Leak integrity: 1×10-7Pa･m3/sec He
Drive power source: 100-240VAC : ≦500mA
Communication: Analog : 0～5VDC
Wetted surface material: SUS316L, PTFE, Fluoro-Rubber
Seal material: Fluoro-Rubber
Actuator system: Thermal (Excluding Mass Flow Meter)
Surface treatment: Machined finish
Standard fitting: 3/8in.SWL (equivalent)
Accessory: Power cord, User's manual, Written guarantee
