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Measurement system: Cold cathode according inverted magnetron principle and thermal conductivity according pirani principle
Measurement range (N2):
1 × 10^-7 ... 1000 mbar
0.75 × 10^-7 ... 750 Torr
Accuracy total pressure reading (N2)
1 × 10^-7 ... 100 mbar: 30% of reading
100 … 1000 mbar: 50% of reading
Repeatability total pressure reading (N2)
1 × 10-7 ... 100 mbar: 5 % of reading
Gas analysis
Measurement system: Optical emission spectroscopy with integrated DC discharge plasma, spectrometer and intelligent electronics
Measurement range (N2):
1 × 10-7 ... 5 mbar
7.6 × 10-8 ... 3.8 Torr
Detection limit 25 liter chamber
O2 leaks in pressure rise method: ≥0.3 mTorr / min
O2 leaks during pump down from atmosphere with N2 backfill: ≥1 mTorr / min
Sampling frequency: <10 Hz
Typical exposure time: 5 … 1000 ms
Spectral range: 313 … 870 nm
Pressure
Limited to inert gases <50°C: ≤10 bar (absolute)
Temperature
Operation (ambient): +5 ... +50 °C
Storage: -20 ... +70 °C
Bakeout at flange with electronic unit: ≤80 °C
Bakeout at flange w/o electronic unit: ≤120 °C
Relative humidity for 30 days a year: ≤95% (non-condensing)
Supply voltage
At gauge: +14.5 ... +30 V (dc)
Ripple: ≤1 V (p-p)
Power consumption: ≤5 W
Fuse to be connected: ≤1 AT
Output signal
Analog: 0 ... +10 V (dc)
Digital: RS232C
Electrical connection: D-Sub, 9-pin, male
High voltage (in the measuring chamber)
Ignition voltage: ≤4.5 kV
Operating voltage: ≤3.3 kV
Internal volume: ≤46 m3 (2.81 inch3)
Weight: ≤700 g
Dimensions
Footprint: 68 × 68 mm
Height: ≤154 mm
Protection type: IP40
Standards: CE
