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Measuring range (XxYxZ): 500x400x150mm
Stage size: 706x566mm
Glass stage size: 550x450mm
Resolution of X/Y/Z axis: 0.5µm
Accuracy of X/Y axis: ≤(3+L/200)µm (L is the measuring length in mm)
Repeatability of X/Y axis: 2µm
Objective: 0.7X~4.5X (zoom)
Working distance: 55mm
View field (diagonal length): 1.3~7.6mm
Magnification: 29X-143X (on 21.5" monitor)
Camera: 1/3" color CCD, 0.3M pixel
Illumination
contour: programmable segmented ring light
surface: adjustable LED light
Max. height of workpiece: 150mm
Max. weight of workpiece: 20kg
Operation system: Windows 10/11
Drive method: automatic
Power supply: 220V, 50/60Hz
Dimension (LxWxH): 800x1040x1780mm
Weight: 500kg
