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Measure range:
Max diameter: ф300mm
Min inner diameter: ф3mm
Max height: 420mm
Accuracy of principal axis;
o radial error: ±(0.025+5H/10000)μm
o axial error: ±(0.025+6X/10000)μm
Parallelism between axis of rotation and z-axis guide rail:
2μm/300mm(Busbar benchmark)
Workbench
Mesa diameter: φ160mm
Swing diameter: φ320mm
Load capacity: 30Kg
Adjustment range Adjustable eccentric: ±2mm ; Adjustable level: ±1°
Rotational speed: 0-12 rpm (adjustable)
Column
Straightness (narrow range): 0.5μm /100mm
Straightness (full range): 0.8μm /300mm
Horizontal arm
Horizontal travel distance: 160mm
Move speed: 0.5-6mm/s OR MANUAL
Sensor
Stroke: 500μm (Radius difference)
Resolution: 0.005μm
Needle shape :Ruby ball probe (diameter 2mm)
Sensor direction/adjustment: Angle either direction/±45°
Data collection: Imports grating 7200point/week
Magnification: Any to a maximum of 200,000 times
