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Work table
X/Y axis travel: 1000*1600mm
Z axis travel: Effective space is 245mm,focusing stroke is 200mm, work distance is 95mm
Mental table size: 1200*1800 mm
Glass table size: 1100*1700mm
Drive type X/Y/Z axis precision linear guide, grinding ball screw drive.
Measure drive system
Optical scale resolution: X/Y/Z axis 0.0005mm(0.5μm)
Measure accuracy: ≤3μm+L/200 reapeatability accuracy: ≤3μm+L/200
Z axis high performance servo motor, double closed loop control system.
Image System
Camera: Japanese SONY CCD video magnification 30-230X
Len: high definition zoom lens/Continuous magnification 0.7-4.5X
Can match: 0.5X objective lens,total magnification:15-115X
Can match: 2X objective lens, total magnification: 60-460X
Light system: Surface light and projection light, cold light, long life, brightness adjustable.
Machine external dimension: 1750*2650*1650
Weight: 3600 kg
