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Rotary table
Bearing Type: Gas bearing
Rotation accuracy: (0.025+6H/10000)μm
Rotating speed: 4, 6, 8, 10rpm
Adjust table diameter: 180mm
Table loading capacity: 25kg
Rotation diameter: 560mm
Max measure diameter: 280mm
Min measure inner diameter: 1mm probe (Optional)
Column (Z-axis )
Column transverse travel: 320mm
Max detection depth: 100mm(min inner diameter: 30mm)
Column straightness: 0.3μm/100mm
Horizontal arm (Xaxis)
Horizontal movement: 165mm
Protrusion amount: 25mm
Detector
Acquisition device: Circle grating
Circumference of sampling points: 16384 points
Sensor type: Inductive Sensor
Sensor range: ±300μm
Sensor resolution: 0.01μm
X raste:r RENISHAW grating scale
Z raster: RENISHAW grating scale (Resultion: 0.0005mm)
