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Measurement range
Sensor: Measuring range: ± 500μm, sharpness of separation: 0.001μm
Column: Measuring range: 350mm, sharpness of separation: 0.2μm
Adjusting the center and leveling the workbench: 20kg
Technical parameters
Rotary axis system
Revolving: （ 0.025+6H/10000） μm
Rotation speed: 6rpm
Maximum: 300mm
Maximum: 450mm
Horizontal arm
Horizontal: 165mm
Horizontal: 255mm
Horizontal: electric
Vertical axis (Z-axis)
Column: 0.3μm/100mm
Vertical movement: electric
Circular detector
Circular detector: circular grating
Circular sampling: 14400
