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Range X-axis: 0-23.62in 0-600mm
Range Y-axis: 0-25.59in 0-650mm
Range Z-axis: 0-9.84in 0-250mm
Resolution: 0.1µm
Resolution Z scale using Tracking Autofocus (TAF): -
Camera: High-sensitivity CCD camera B&W
Accuracy: E1xy (1.5+3L/1000)µm
E1z (1.5+4L/1000)µm
E2xy (2+4L/1000) µm
E U,MPE (ISO10360-7:2011) - 3+5.5L/1000, 3+6.0L/1000**
PF2D,MPE (ISO10360-7:2011) - 2.3µm
Drive Speed: 300mm/s
Illumination: Surface-White LED
Contour- White LED
Programmable Ring Light- White LED
Maganification change system: Programmable power turret (1x2x6x)
Stage glass size: 27.4x29.8in 697x758mm
Max. workpiece height: 9.8in 250mm
Max.workpiece load: 110lbs 50kg
Dimension(including machine stand): 51.5x78.1x70.6in 1309x1985x1794mm
Mass(including machine): 3196lbs 1450kg
Optional accessories:
Laser Auto Focus
Rotary Index
