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Range X-Axis: 0-60in 0-1500mm
Range Y-Axis: 0-17in 0-1750mm
Range Z-Axis: 0-4in 0-100mm
Resolution: 0.1µm
High-sensitivity CCD camera: BW
Accuracy (20°C 1.0°C): E1xy-(2.2+3L/1000)µm
E1z-(4.0+5L1000)µm
E2xy-(3.5+4L/1000)µm
Max.Drive Speed: X/Y 300/150mm/s
Illumination: Surface-LED,white; Contour-LED,White; PRL-LED,white (4 divisions)
Magnification change system: Programmable power (1x ,2x ,6x) turret
Stage glass size: 67.5x77.5in 1714x1968mm
Dimension: 96x113x61in 2440x2868x1554mm
Mass: 9900lbs 4500kg
