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Flow Method: Viscous Flow Through a Choked Orifice
Full Scale Flow Range: 1 to 1000 sccm (N2 equivalent)
Control Range: 5.0 to 100% of Full Scale
Typical Accuracy: ±5.0% of Full Scale
Repeatability: ±0.2% of Full Scale
Resolution: ±0.1% of Full Scale
Operating Temperature: 30°C to 100°C, adjustable
Optional Operating Temperature Range: 90°C to 150°C
Controller Input Power Required: ±15 VDC (±2%) @ 0.28 Amps
Heater Input Power Required: ±15 VDC @ 1.5 Amps
Set Point Signal: 0-5 VDC from <20K Ω
Flow Output Signal: 0-5 VDC into >10K Ω
Temperature Output: 10 mV/°C
Relay Contact Ratings: 2 Amps @ 28 VDC; 1 Amp @ 120 VAC resistive
Signal Connector: 15-pin Type "D", RFI/EMI shielded
Heater Connector: 9-pin Type "D", RFI/EMI shielded
Maximum Line Pressure: 35 psia
Fitting Type: Swagelok ® 8 VCR® male
Weight: 7.9 lbs (3.59 kg)
Compliance: CE
For specific range please check the attachment below!