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Measurement Ranges: 0.1% to 100% of Full Scale
Full Scale Flow Range: 5-50000 sccm (N2 equivalent)
Flow Input Output Signal: Voltage (0 to 5 VDC)
Current (4 to 20 mA)
Analog Connector: 15 pin Type D male
9 pin Type D male
15 pin Type D male
Maximum Inlet Pressure: 500 psi
Proof Pressure: 1000 psig
Burst Pressure: 1500 psig
Typical Accuracy: ±1% of Reading
Repeatability: ± 0.3% of Reading
Resolution: 0.1% of Full Scale
Zero Temperature Coefficient: <0.05% of Full Scale/°C
Span Temperature Coefficient: <0.08% of Reading/°C
Inlet Pressure Coefficient: <0.02% of Reading/psi
Warm-up Time: 30 minutes
Operating Temperature: 10-50°C
Storage Humidity: 0 to 95% Relative Humidity, non-condensing
Wetted Materials: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
Power Requirements: +15 to +24 VDC @ (<2 watts)
Weight: <2.5 lbs (1.1 kg)
Compliance: CE
For specific range please check the attachment below!
