MKS HA-MFV High Accuracy In-Situ Mass Flow Verifier (5 - 3000 sccm)

Repeatability: ±0.5% of Reading

Reproducibility: ±0.3% of Reading

Pressure Range: 100 Torr

Pressure Accuracy: 0.25% of Reading

Proof Pressure: 45 psia

Burst Pressure: 150 psig

Minimum Penumatic Air Supply Pressure: 80 psig

Maximum Penumatic Air Supply Pressure: 100 psig

Span Temperature Coefficient: <0.002% Reading/°C

Warm-up Time: 60 minutes

Operating Temperature: 10 - 40°C

Temperature Display: 0 - 100°C

Temperature Accuracy: ± 2°C

Temperature Resolution: 0.1°C

Storage Humidity: 0 - 95% RH non-condensing

Storage Temperature: -20 - 60°C (-4 - 160°F)

Control Interface: DeviceNet: 5-pin DeviceNet Micro Connector Type

                             EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)

Diagnostic Interface: Ethernet RJ-45 female

Input Voltage: DeviceNet: 11-25 VDC

                       EtherCAT: 11-25VDC +24 VDC (±10%)

Dimensions: 6.98 x 10.0 x 10.0 in. (177.3 x 254.0 x 254.0 mm) (height x width x length)

Weight: 23.9 lbs (10.9 kg)

Compliance: CE

Temperature Readout Units: °C

Full Scale Verification Range: 5 - 3000 sccm (N2 equivalent)

Typical Accuracy: ±1.0% of Reading

For specific range please check the attachment below!