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Ozone Concentration: 3-90 ppm
Flow Rate: 2-140 lpm
Feed Gas: O2
Dopant Gas: CO2
Wetted Surfaces: Liquid: PFA, PTFE, quartz glass
Gas: 316L stainless steel, PFA, PTFE
Control Interfaces: Binary in/out, RS232/RS485, analog 4 - 20 mA in/out, USB
Dimensions: 1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
Weight: 315-400 kg, depending on configuration
Compliance: CE, SEMI F47, SEMI S2
