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H2O、 O2: ≤lppm
The leak rate: ≤0.05Vol% h (monthly leakage of oxygen <1L)
Foreline vacuum degree: 0 ~ -0.1MPa (2.5-stage vacuum table)
Case vacuum degree: 0 ~ -0.1MPa (2.5-stage vacuum table)
Transfer chamber can withstand: vacuum degree ≥100Pa
Working gas: nitrogen, argon, helium (purity 99.5%)
Datasheet
Features:
1 .Configuration internationally renowned brand components;
2.Water, oxygen index of less than 1ppm
3.Excellent sealing performance, easy to replace,
4.Unique design, lightweight, tight structure, easy operation,
5.Pneumatic automation control, testing, production, reduction;
6.The color touch screen, man-machine dialogue,
7.Foot Switch: the pressure inside can be adjusted by foot switch
8.English user interface (customer choice)
9.Cabinet material using SUS304 (3mm) stainless steel;
10.Sound technical services.
