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Resolution:
3 nm (2 nm) @ 30 kV SE and W (LaB6)
4 nm @ 30 kV VP mode
20 nm (9 nm) @ 1 kV SE and W (LaB6)
Acceleration Voltage: 0.2 to 30 kV
Probe Current: 0.5 pA to 5 µA
Magnification: < 5 - 1,000,000x
Field of View: 6 mm at the Analytical Working Distance (AWD)
X-ray Geometry: 8.5 mm AWD and 35° take-off angle
OptiBeam* Modes: Resolution, Depth, Analysis, Field of Fisheye
Pressure Range: 10 – 400 Pa
Available Detectors:
ETSE – Everhart-Thornley Secondary Electron Detector (supplied as standard)
BSD – Five Segment Diode Backscattered Electron Detector (supplied as standard)
VPSE – Variable Pressure Secondary Electron Detector
SCD – Specimen Current Detector
EDS – Energy Dispersive Spectrometer
WDS – Wavelength Dispersive Spectrometer
CL - Cathodoluminescence Detector
STEM - Scanning Transmission Electron Microscopy Detector
Chamber Dimensions: 365 mm (Ø) x 275 mm (h)
5-Axes Motorised Compucentric Specimen Stage:
X = 125 mm
Y = 125 mm
Z = 50 mm motorized (maximum sample height extends to 145 mm with Z, tilt and rotate module removed)
T = -10 to 90°
R = 360° (continuous)
Stage control by mouse, joystick or control panel
Future Assured Upgrade Path Options: BeamSleeve
Image Framestore:
Resolution: Up to 32k x 24k at scan speed 2 and higher
Signal acquisition by integrating and averaging
Image Display:
High quality flat panel
Capable of dual channel display
System Control:
SmartSEM** GUI operated by mouse and keyboard
Multilingual Windows® operating system
Utility Requirements:
100 – 230 V, 50 or 60 Hz single phase
No water cooling requirement
Joystick, US Keyboard, US control panel and mouse supplied
