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Performance
Pressure Control Mode: Upstream
Full Scale Range: 3-5000 sccm N₂Eq.
Pressure Reading
Accuracy: ±1% of reading
Zero Temperature Coefficient: ±0.02% of F.S./ºC
Span Temperature Coefficient: ±0.04% of reading/ºC
Pressure Control
Measurement Range: 2-100% F.S.
Accuracy: <10% F.S. ±0.2% F.S., 10-100% F.S. ±1% F.S.
Response Time: <1 sec typ. (excluding system time constant)
Ratings
Operating Temperature Range: 10 to 50ºC
Transducer Pressure Range: 1000 Torr
Transducer Over Pressure Limit: 2000 Torr
Differential Pressure: 150 Torr min
Leak Integrity (external): 1 x 10⁻¹⁰ atm. cc/sec He
Electrical
Electical Connection:
RS485/Analog via 9-Pin "D" connector,
DeviceNet™ via 5-pin "M12" connector
Digital Communications:
RS485 (model specific),
DeviceNet (model specific)
Diagnostic/Service Port: RS485 via 2.5 mm jack
Power Supply/Consumption:
DeviceNet: 545mA max. @ +11-25 Vdc, 250 mA max. @ 24 Vdc
RS485/Analog: 6 Watts max @ ±15 Vdc.(±10%) or +24 Vdc (±10%)
