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Fitting: DN16KFEXT; Electrical Connection: 9pin D Sub
Performance
Measurement Range 7.5 × 10⁻⁷ to 1000 Torr
Sensor Measurement Ranges:
MEMS Pirani thermal conductivity:7.5 × 10⁻⁷ to 1.125 Torr
Blended MEMS Pirani/Piezo: 1.125 to 1.5 Torr
MEMS Piezo resistive diaphragm: 1.5 to 1000 Torr
Accuracy:
7.5 × 10⁻⁶ to 7.49 × 10⁻⁵: ±25% of reading
7.5 × 10⁻⁵ to 7.49 Torr: ±5% of reading
7.5 to 74.9 Torr: ±1% of reading
75 to 599 Torr: ±0.5% of reading
600 to 824 Torr: ±0.25% of reading
825 to 1000 Torr: ±0.5% of reading
Hysteresis:
7.5⁻⁴ to 7.5 Torr: 1%
7.5 to 900 Torr: 0.1%
Vacuum Temperature Sensor:
Range: -20 to +85°C
Accuracy: ±1.5°C
Response Time: <20 ms
Temperature Compensation: 10 to 50°C
Materials Exposed to Vacuum: 304 stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO₂,Si₃N₄,Gold, Viton, low out-gassing epoxy resin, solder, RO4305
Flange/Fitting: SS 1.4307/AISI 304L
Electrical
Analog Output Signal (absolute pressure): 0.5 -9.5 Vdc (1V per decade) standard, other selectable/user programmable options¹
Analog Output Resolution: 16 bit (150 µV)
Analog Output Update Rate: 124 Hz
Digital Communication: RS232 / RS485
Electrical Connector: 9-pin HD D-sub
Solid State Relays
Number of Relays: Up to 3
Set Point Range (absolute): 3.75×10⁻⁶ to 1000 Torr
Set Point Range (atm. relative): -770 to +375 Torr
Contact Rating: 50 V, 100 mArms / mADC
Approvals:
UL Recognized: File E76270
CSA Certified: Certificate 1175739
EN/IEC 60950-1 Certified
For more details, see datasheet.
