Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Fitting: DN16KF;
Electrical Connection: 9 pin D Sub
Performance
Measurement Range 7.5 × 10⁻⁷ to 1000 Torr
Sensor Measurement Ranges:
MEMS Pirani thermal conductivity:7.5 × 10⁻⁷ to 1.125 Torr
Blended MEMS Pirani/Piezo: 1.125 to 1.5 Torr
MEMS Piezo resistive diaphragm: 1.5 to 1000 Torr
Accuracy:
7.5 × 10⁻⁶ to 7.49 × 10⁻⁵: ±25% of reading
7.5 × 10⁻⁵ to 7.49 Torr: ±5% of reading
7.5 to 74.9 Torr: ±1% of reading
75 to 599 Torr: ±0.5% of reading
600 to 824 Torr: ±0.25% of reading
825 to 1000 Torr: ±0.5% of reading
Hysteresis:
7.5⁻⁴ to 7.5 Torr: 1%
7.5 to 900 Torr: 0.1%
Vacuum Temperature Sensor:
Range: -20 to +85°C
Accuracy: ±1.5°C
Response Time: <20 ms
Temperature Compensation: 10 to 50°C
Materials Exposed to Vacuum: 304 stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO₂,Si₃N₄,Gold, Viton, low out-gassing epoxy resin, solder, RO4305
Flange/Fitting: SS 1.4307/AISI 304L
Electrical
Analog Output Signal (absolute pressure): 0.5 -9.5 Vdc (1V per decade) standard, other selectable/user programmable options¹
Analog Output Resolution: 16 bit (150 µV)
Analog Output Update Rate: 124 Hz
Digital Communication: RS232 / RS485
Electrical Connector: 9-pin HD D-sub
Solid State Relays
Number of Relays: Up to 3
Set Point Range (absolute): 3.75×10⁻⁶ to 1000 Torr
Set Point Range (atm. relative): -770 to +375 Torr
Contact Rating: 50 V, 100 mArms / mADC
Approvals:
UL Recognized: File E76270
CSA Certified: Certificate 1175739
EN/IEC 60950-1 Certified
For more details, see datasheet.
