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Fitting: DN16KF;
Electrical Connection: 15pin D Sub
Measuring range: 7.5E-7 to 1000 Torr
Measuring principle 7.5E-7 to 7.5E-4 mbar: MEMS Pirani thermal conductivity
Measuring principle 7.5E-4 to 3.75E-3 mbar: Blended MEMS Pirani / piezo reading
Measuring principle 3.75E-3 to 3 mbar: Capacitance diaphragm gauge (CDG)
Measuring principle 3 to 4.5 mbar: Blended MEMS Piezo / CDG
Measuring principle 4.5 to 1000 mbar: MEMS piezo resistive diaphragm
Accuracy 7.5E-6 to 7.5E-5 mbar: 25% of reading
Accuracy 7.5E-5 to 7.5E-3 mbar: 5% of reading
Accuracy 7.5E-3 to 599 mbar: 0.5% of reading
Accuracy 600 to 824.9 mbar: 0.25% of reading
Accuracy 825 to 1000 mbar: 0.5% reading
Barometric measurement range: 225 to 900 Torr
Vacuum temperature sensor range: -20 to + 85°C
Vacuum temperature sensor accuracy: +/- 1.5 °C
Analog output resolution: 16 bit (150 µV)
Analog output update rate: 124 Hz
Response time: <20 ms
Temperature compensation: +10 to +50 °C
Solid state relay set point range (absolute): 3.75E-6 to 1000 Torr
Solid state relay set point range (atm. relative): -770 to +375 Torr
Solid state relay contact rating: 50 V, 100 mArms / mADC
Solid state relay contact endurance: Unlimited (no mechanical wear)
Solid state relay approvals: UL Recognized File E76270
CSA Certified: Certificate 1175739
EN/IEC 60950-1 Certified
For more details, see datasheet.
