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Standard field of view: (0.49*0.49)mm
Max field of view: (6x6)mm
Reflectivity of test object: 0.5 % ~100 %
Repeatability of Roughness RMS: 0.005nm
Scanning range: ≤10mm
Resolution: 0.1nm
Accuracy of stage measurement: 0.3 %
Repeatability of stage measurement: 0.08% 1σ
X, Y Object table:
Size: (450x450)mm
Moving range: (300x300)mm
Load capacity: 10kg
Control method: Motorized
