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Size: W510×D400×H1100(mm)
Input power: AC100-240V
Current consumption: About 125VA ※In the case of 3 mass flow controllers equipped with
Flow rate control range: 1 LINE : F.S.10SCCM～20SLM (However, the mixed gas flow rate must be less than 50 SLM)
Flow rate control: MFC : C1000 Series or FCST1000L Series
Flow rate output signals: 0-5VDC
INLET, OUTLET Valve: Solenoid Valve
Leak Integrity: ≦5×10-7Pa･m3/sec He
Pressure resistance: 0.5MPa
Wetted surface material: SUS316, PTFE, Fluoro-Rubber (FCST1000L Series : Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber)
Standard fitting: 1/4in.SWL (equivalent)
Operating environment: 5-50℃, 30-80％RH (Scope of accuracy guarantee : 15-35℃)
Accessory: AC cable(2m), User's manual, Written guarantee
