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Motion stroke (mm): X:2000mm Y:1300mm
Focusing stroke (mm): (Z axis) 150mm
Measurement and aiming system: 2/3"sony senser, digital color camera, 2560*1920
Off-site accuracy: 3+（L/1000）um
In-field accuracy: ±1um
Face backlight: 75 inches (3 rows and 4 columns can be partitioned control)
Reflective lighting system: High-definition LED reflective lighting
Transmission lighting system: High-definition LED transmission lighting
Working height: 850mm
Dimensions (mm) (length*width*height): 3000*2200*1750
Instrument weight (kg): About 3600KG
Glass table bearing: 50kg
Instrument power: 220V±10%（AC）50HZ
Configuration:
CCD: HD digital CCD
Optical system:
Three heads: LV-TI3 Trinocular Eyepiece Tube CH (with Erect Image)
Eyepiece:
Eyepiece CFI 10x / CN
Eyepiece CFI 10x CM Eyepiece with Crosshairs / CN
Nose wheel:
Nikon L-NU5A Motorized Universal Quintuple Nosepiece
Polarizer: Nikon YM-PO Polarizer for LV-U EPI
Polarizer: Nikon L-AN Analyzer for LV-U EPI
DIC prism: Nikon L-DIHC DIC Slider
Objective lens: 5x、10x、20x CR、50x CR 、100x CR
Nose wheel controller: Nikon LV-NCNT
Scale: Imported RENISHAW metal grating ruler with resolution 0.0001mm
XYZ axis drive: THK high precision linear guide and THK grinding grade ball screw
Drive: Panasonic servo motor
Machine body: Marble
Photoelectric limit: Japan Omron
Operating software: Custom made
Software dongle: USB dongle (built into the computer case)
Industrial computer:
CPU:Intel i7
Memory: Kingston 8GB
Hard disk caparity: Western Digital 2TB (including auto backup disk)
Monitor: LENOVO 21.5" LCD (FHD,Without Defect)
Keyboard: LENOVO
Software: Windows 7/L42:L44Anti Virus/Office2016 (Excel, Word, PPT)Windows 7/Anti Virus/Office2016 (Excel, Word, PPT)
Software instruction manual: Electronic file / paper file
