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Measuring principle: By interferometer, by white light interferometer.
Light source (WLI): LED, 505 nm
Measuring range:Sensor unit can be moved manually over 200 mm in Z
Object table can be moved manually in X and Y
Interferometer, white light interferometer:
Measuring range (WLI): Up to 100 µm (vertical). More on request.
Supplied with:
• Sensor system consisting of:
- WLI sensor head
- Camera, 1280 x 1024 pixels, up to 169 fps
- 100 µm piezo drive, z-measuring head
• WLI software module, operating Software
• PC with Windows 10 and 24” screen
• Granite base and column with manual positioning of sensor system
• Manual XY object table for object positioning
• 20x0.4 DI lens (white light Interferometer)
Datasheet:
