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Unit: Inch/mm
Measuring range: Z1 = 50 mm; X = 100 mm
Measuring speed: 0.02 - 5 mm/s
Drive speed: X = 0 - 20 mm/s
Accuracy:
X = (2,5 + 0,02L) µm
[L: drive length (mm)]
Z1 = (2,5 + I0,1HI) µm
[H: Measurement height from the horizontal position (mm)]
Traverse straightness: 2.5 µm / 100 mm
Column type: M4: 350 mm
