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Type: AX7696MKS-01 Remote Plasma Source
Ignition Window Pressure: 1.0 to 4.0 Torr, Gas: In Process Gas
Process Gas: O2, N2., Max Total Gas Flow: 10 slm
Operating Pressure: 0.5 to 4 torr
Duty Cycle: 100%
Interlocks: Internal thermal switch and internal water flow switch to protect against insufficient cooling
Wetted Materials; 6061-T6 Aluminum, Kalrez®, SiO2, 316L SS, Nickel, Fluorosilicone
Control Interface: Analog, EtherCAT
Power Requirements: 208 VAC, 50/60 Hz, 30A, 3 phase
Cooling Water: 1.75 gpm, <30°C Ambient 40°C max.
Dimensions: 15.7 x 13.7 x 12.14 inches (399mm x 348mm x 308mm nominal)
Weight: 81 lb. (38.6 Kg)
Compliance: CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1
