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Ozone Output: 375g/Nm3
Flow Rate: 22.7 lpm (6.0 gpm) per generator
Feed Gas: Oxygen, Nitrogen (100 - 1000 ppm of total flow)
Feed Gas Supply Pressure: O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm2)
N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm2)
Feed Gas Purity: Oxygen: Grade 6 or better O2
Nitrogen: Grade 5 or better N2
Operating Temperature: 5 - 40°C (41 - 104°F)
Cooling Water Temperature Required: 5 - 25°C (41 - 77°F)
Cooling Water Filtration Required: 100 microns
Cooling Water Quality Required: 3 - 0.5 MΩcm DI
Voltage Requirements: 208 volts AC (±10%), three phase
Frequency: 50/60 Hz
Exhaust Flow Rate: 70.8 l/s (150 cfm) per generator
Control Air Pressure: 70 - 100 psig (483 - 689 kPa)
Dimensions: 28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
Relative Humidity: 30 - 90% (non - condensing)
Weight: 345 kg (760 lb) for system with one generator
Compliance: CE, UL/CSA, SEMI S2, SEMI F47
Altitude: Up to 1000 m (3280 ft) above mean sea level
