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Full Scale Range (N2 equivalent): 100 to 250 slm
Maximum Inlet Pressure MFC/MFM: 150 psig (can not exceed pressure differential requirement across MFC)
Burst Pressure: 1500 psig
Control Range: 2% to 100% of Full Scale (range on mech.)
Typical Accuracy: ±1% of set point for > 20% to 100% Full Scale
±0.25% of Full Scale for 5% to 20% Full Scale
Repeatability ±0.5% of Reading
Resolution: 0.1% of Full Scale
Temperature Coefficients:
- Zero: <0.05% of Full Scale/°C
- Span: <0.08% of Reading/°C
Inlet Pressure Coefficient: <0.03% of Reading/psi or less
Typical Controller Settling Time: 1 to 2 seconds typical above 10% Full Scale @ 50 psi
Warm-up Time: 1 hour
Operating Temperature Range (Ambient): 10°C to 50°C
Storage Humidity: 0 to 95% relative humidity, non-condensing
Storage Temperature: -20° to 65°C (-4° to 149° F)
Wetted Materials: 316L S.S. 17-7 S.S., Elgiloy®, 430FR
Seal Options: Viton®, Buna, Neoprene®, EPDM, Viton (USP Class VI Compliant)
Surface Finish MFC/MFM: 16μ inch average Ra
Weight: <4.5 lbs (2.05 kg)
Electrical Analog I/O:
- Input Power Required: +15 to +24 VDC @ (<4 watts)
- Flow Input/Output Signal: Voltage (0 to 5 VDC): 15 pin Type ‘’D’’ male
Current (4 to 20 mA): 15 pin Type ‘’D’’ male
- Compliance: CE
For specific range please check the attachment below!
