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Plasma mode: RIE (reactive ion etching)
Electrode structure: Parallel flat panel type
Electrode dimensions: W130×D130mm
Vacuum meter: Bourdon gauge
Controller: Sequencer
Matching method: Auto tuning
Internal dimensions（W×D×H mm）: 230×130×100mm
External dimensions（W×D×H mm）: 438×520×565mm
Power Source: 115V /220V Single phase with step-down transformer
Weight: 50kg
