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System: DP mode, Barrel type
High Frequency Output: Max. 500W
Oscillation Frequency: 13.56MHz
Tuning Method: Automatic tuning
Reaction Chamber: Made of quartz, ø215×305mm
Reaction Gas System: Dual system (O2/CF4)
Control system: Automatic touch panel
Piping Material: SUS、Teflon
Gas inlet: 1/4" swagelok
Vacuum pump inlet: NW25
External dimensions: W520×D630×H760mm
Accessory: Vacuum grease×1 pc, O-ring for reaction chamber×1 pc
Power Source: AC220V~AC415V Three phase with step-down transformer
Weight: 70kg
Standard accessories:
Vacuum grease×1 pc.
O-ring for reaction chamber×1 pc.
Optional accessories:
Frame for wafers (2, 3, 4, 5 inches)
Multi-purpose angled frame
Aluminum etching tunnel (φ180 max.)
Vacuum pump (250L/min. or more)
