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X-axis measuring range: 0~100mm
Profile measurement accuracy:
Angle: ≤1’
Z1: ≤±(0.5+|6H|/100)μm
Standard arc Pt accuracy: ≤±0.3µm
Standard sphere: ≤±(1+R/20)μm
Roughness measurement accuracy: Ra ≤±(4nm+2.0%A)
Scanning speed: 0.05~5mm/s adjustable
Once Scanning for both Profile and Roughness
Manufacturer: Chotest Technology Inc.
